| 規(guī)格 | 中心高 | 測量直徑 | 精度 | |
| 平行方向μm | 垂直方向μm | |||
| 200 | 100 | 130 | ≤6 | ≤4 | 
| 300 | 170 | 270 | ≤8 | ≤5 | 
| 300 | 250 | 420 | ≤8 | ≤5 | 
| 300 | 300 | 520 | ≤8 | ≤5 | 
| 500 | 170 | 270 | ≤8 | ≤5 | 
| 500 | 250 | 420 | ≤8 | ≤5 | 
| 500 | 300 | 520 | ≤8 | ≤5 | 
| 1000 | 170 | 270 | ≤10 | ≤8 | 
| 1000 | 250 | 420 | ≤10 | ≤8 | 
| 1000 | 300 | 520 | ≤10 | ≤8 | 
| 1500 | 250 | 400 | ≤16 | ≤15 | 
| 2000 | 250 | 400 | ≤30 | ≤20 | 

